This work presents a gravimetric biosensor based on a capacitive micromachined ultrasonic transducer (CMUT). Resonant and acoustic wave devices have recently been studied extensively for chem/bio sensing applications. Small membrane mass and high resonance frequency along with high quality factor of CMUTs facilitate a highly sensitive biosensor system. The limit for the minimum detectable loaded mass per unit area achieved in this work is 0.44 ag/μm 2 . Here we demonstrate a selective human immune protein immunoglobulin G (IgG) sensor with hexamer peptide ligand HWRGWV.
This work presents a gravimetric biosensor based on a capacitive micromachined ultrasonic transducer (CMUT). Resonant and acoustic wave devices have recently been studied extensively for chem/bio sensing applications. Small membrane mass and high resonance frequency along with high quality factor of CMUTs facilitate a highly sensitive biosensor system. The limit for the minimum detectable loaded mass per unit area achieved in this work is 0.44 ag/μm 2 . Here we demonstrate a selective human immune protein immunoglobulin G (IgG) sensor with hexamer peptide ligand HWRGWV.
